Resources and Infrastructure

• UltraSurf 5X 400 5-Axis Non-Contact Metrology System
• Nanoscribe Photonic Professional GT 3D
• Moore Nanotechnology 650FGv2
• X-ray diffractometer
• Scattering facility
• Micro-optic reflection and transmission interferometer
• Microindenter
• Ellipsometers
• Scanning Tunneling Electron Microscope
• Scanning electron microscope
• Carl Zeiss scanning electron microscope
• Atomic force microscope
• Nanoindenter
• Uniaxial Testing Platform
• X-ray diffraction
• 3D form measurement
• Perkin Elmer Dynamic Mechanical Analyzer
• Non-contact 3D profilometer
• Zygo phase-measuring interferometer
• PerkinElmer FTIR microscope
• Carl Zeiss F25 coordinate measuring machine
• Twyman-Green interferometer
• Laser confocal microscope
• Zygo NewView scanning white light interferometer
• Zygo Verifire MST interferometer
• Zygo Verifire interferometers
• 633 nm interferometer
• Overarm polisher
• 6-axis polishing
• Continuous polishing
• E-beam lithography
• 5x stepper
• Ultraform finishing
• Magnetorheological finishing
• 5-axis CNC manufacturing
• 2-axis diamond turning
• 5-axis diamond machining