Metrology
- UltraSurf 5X 400 5-Axis Non-Contact Metrology System
- X-ray diffractometer
- Scattering facility
- Micro-optic reflection and transmission interferometer
- Microindenter
- Ellipsometers
- Scanning Tunneling Electron Microscope
- Scanning electron microscope
- Carl Zeiss scanning electron microscope
- Atomic force microscope
- Nanoindenter
- Uniaxial Testing Platform
- X-ray diffraction
- 3D form measurement
- Perkin Elmer Dynamic Mechanical Analyzer
- Non-contact 3D profilometer
- Zygo phase-measuring interferometer
- PerkinElmer FTIR microscope
- Carl Zeiss F25 coordinate measuring machine
- Twyman-Green interferometer
- Laser confocal microscope
- Zygo NewView scanning white light interferometer
- Zygo Verifire MST interferometer
- Zygo Verifire interferometers
- 633 nm interferometer