2021
DeMars, Luke A.; Suleski, Thomas J.
Separating and Estimating Impacts of Anisotropic Mid-Spatial Frequency Errors Proceedings
2021, ISBN: 978-1-943580-88-0.
Abstract | Links | BibTeX | Tags: manufacturing, Mid-Spatial Frequency error, related
@proceedings{DeMars2021,
title = {Separating and Estimating Impacts of Anisotropic Mid-Spatial Frequency Errors},
author = {Luke A. DeMars and Thomas J. Suleski },
editor = {OSA Technical Digest (Optica Publishing Group, 2021)},
doi = {10.1364/OFT.2021.OW3B.2},
isbn = {978-1-943580-88-0},
year = {2021},
date = {2021-06-30},
urldate = {2021-06-30},
abstract = {We present a methodology based on the areal power spectral density to separate and
estimate the impacts of multiple anisotropic mid-spatial frequency surface errors on optical
performance.},
keywords = {manufacturing, Mid-Spatial Frequency error, related},
pubstate = {published},
tppubtype = {proceedings}
}
estimate the impacts of multiple anisotropic mid-spatial frequency surface errors on optical
performance.
DeMars, Luke A.; Suleski, Thomas J.
Differentiation of Mid-Spatial Frequency Surface Errors Using Areal Power Spectral Density Presentation
ASPE Spring Topical Meeting: Freeform and Structured Surfaces, 29.04.2021.
BibTeX | Tags: CeFO related, Mid-Spatial Frequency error
@misc{DeMars_2021_2,
title = {Differentiation of Mid-Spatial Frequency Surface Errors Using Areal Power Spectral Density},
author = {Luke A. DeMars and Thomas J. Suleski},
year = {2021},
date = {2021-04-29},
urldate = {2021-04-29},
howpublished = {ASPE Spring Topical Meeting: Freeform and Structured Surfaces},
keywords = {CeFO related, Mid-Spatial Frequency error},
pubstate = {published},
tppubtype = {presentation}
}
2019
JING XU LAUREN L. TAYLOR, MICHAEL POMERANTZ; QIAO, JIE
Femtosecond laser polishing of germanium Journal Article
In: Optical Materials Express, vol. 9, no. 11, pp. 4165-4177, 2019.
Abstract | Links | BibTeX | Tags: CeFO manufacturing, CEFO metrology, fabrication, Freeform surfaces, manufacturing, Mid-Spatial Frequency error
@article{TAYLOR2019,
title = {Femtosecond laser polishing of germanium},
author = {LAUREN L. TAYLOR, JING XU, MICHAEL POMERANTZ, THOMAS
R. SMITH, JOHN C. LAMBROPOULOS, AND JIE QIAO},
url = {https://doi.org/10.1364/OME.9.004165},
year = {2019},
date = {2019-10-02},
journal = {Optical Materials Express},
volume = {9},
number = {11},
pages = {4165-4177},
abstract = {Freeform optics can reduce the cost, weight, and size of advanced imaging systems,
but it is challenging to manufacture the complex rotationally asymmetric surfaces to optical
tolerances. To address the need for disruptive, high-precision sub-aperture forming and finishing
techniques for freeform optics, we investigate an alternative, non-contact polishing methodology
using femtosecond lasers, combining modeling, experiments, and demonstrations. Femtosecondlaser-
based polishing of germanium was investigated using an experimentally-validated twotemperature
model of laser/germanium interaction to guide the understanding and selection of
laser parameters to achieve near-nonthermal ablation for polishing and figuring. For the first time
to our knowledge, model-guided femtosecond laser polishing of germanium was successfully
demonstrated, achieving precision material removal while maintaining single-digit nanometer
optical surface quality. The demonstrated femtosecond-laser-based polishing technique lays the
foundation for semiconductor optics polishing/fabrication using femtosecond lasers and opens a
viable path for high-precision, complex sub-aperture optical polishing tasks on various materials.},
keywords = {CeFO manufacturing, CEFO metrology, fabrication, Freeform surfaces, manufacturing, Mid-Spatial Frequency error},
pubstate = {published},
tppubtype = {article}
}
but it is challenging to manufacture the complex rotationally asymmetric surfaces to optical
tolerances. To address the need for disruptive, high-precision sub-aperture forming and finishing
techniques for freeform optics, we investigate an alternative, non-contact polishing methodology
using femtosecond lasers, combining modeling, experiments, and demonstrations. Femtosecondlaser-
based polishing of germanium was investigated using an experimentally-validated twotemperature
model of laser/germanium interaction to guide the understanding and selection of
laser parameters to achieve near-nonthermal ablation for polishing and figuring. For the first time
to our knowledge, model-guided femtosecond laser polishing of germanium was successfully
demonstrated, achieving precision material removal while maintaining single-digit nanometer
optical surface quality. The demonstrated femtosecond-laser-based polishing technique lays the
foundation for semiconductor optics polishing/fabrication using femtosecond lasers and opens a
viable path for high-precision, complex sub-aperture optical polishing tasks on various materials.