2022
Koerber, J.; Boreman, G. D.; Suleski, T. J.
Reduction of retrace error from broadband variable transmission spheres in Fizeau interferometry Journal Article
In: Optics Continuum, vol. 1, no. 5, pp. 1067-1076, 2022.
Links | BibTeX | Tags: CeFO related, metrology
@article{Koerber22b,
title = {Reduction of retrace error from broadband variable transmission spheres in Fizeau interferometry},
author = {J. Koerber and G.D. Boreman and T.J. Suleski},
doi = {https://doi.org/10.1364/OPTCON.458860},
year = {2022},
date = {2022-04-25},
journal = {Optics Continuum},
volume = {1},
number = {5},
pages = {1067-1076},
keywords = {CeFO related, metrology},
pubstate = {published},
tppubtype = {article}
}
Koerber, J.; Boreman, G. D.; Suleski, T. J.
Broadband Variable Transmission Sphere for Fizeau Interferometry Journal Article
In: Optics, vol. 3, pp. 88-98, 2022.
Links | BibTeX | Tags: CeFO related, metrology
@article{Koerber22a,
title = {Broadband Variable Transmission Sphere for Fizeau Interferometry},
author = {J. Koerber and G.D. Boreman and T.J. Suleski},
doi = {https://doi.org/10.3390/opt3010011},
year = {2022},
date = {2022-03-10},
journal = {Optics},
volume = {3},
pages = {88-98},
keywords = {CeFO related, metrology},
pubstate = {published},
tppubtype = {article}
}
2021
Swain, BR; Dorrer, C.; Qiao, J.
Telephoto-lens-based Optical Differentiation Wavefront Sensor for freeform metrology Journal Article
In: Opt. Express, vol. 29, no. 23, pp. 38395-38403, 2021.
Abstract | Links | BibTeX | Tags: metrology, related
@article{Swain2021,
title = {Telephoto-lens-based Optical Differentiation Wavefront Sensor for freeform metrology},
author = {BR Swain and C. Dorrer and J. Qiao},
url = {https://opg.optica.org/oe/fulltext.cfm?uri=oe-29-23-38395&id=464483},
doi = {https://doi.org/10.1364/OE.443558},
year = {2021},
date = {2021-11-03},
urldate = {2021-11-03},
journal = {Opt. Express},
volume = {29},
number = {23},
pages = {38395-38403},
abstract = {We report an Optical Differentiation Wavefront Sensor based on a telephoto lens system and binary pixelated filters. It provides a five-fold reduction in the system length compared to a 4f system with identical effective focal length. Measurements of phase plates with this system are compared to measurements performed with a commercial low-coherence interferometer. The telephoto-lens-based system can measure wavefronts with accuracy better than λ/10 Root Mean Squared (RMS) at λ=633 nm. Experimental investigation shows that the system has a high tolerance to components alignment errors.},
keywords = {metrology, related},
pubstate = {published},
tppubtype = {article}
}
We report an Optical Differentiation Wavefront Sensor based on a telephoto lens system and binary pixelated filters. It provides a five-fold reduction in the system length compared to a 4f system with identical effective focal length. Measurements of phase plates with this system are compared to measurements performed with a commercial low-coherence interferometer. The telephoto-lens-based system can measure wavefronts with accuracy better than λ/10 Root Mean Squared (RMS) at λ=633 nm. Experimental investigation shows that the system has a high tolerance to components alignment errors.
2020
Rosario Porras-Aguilar Ana H. Ramirez-Andrade, Konstantinos Falaggis
Numerical integration of slope data with application to deflectometry Proceedings
vol. 11490, no. 09, 2020.
Links | BibTeX | Tags: metrology
@proceedings{ramirez2020numerical,
title = {Numerical integration of slope data with application to deflectometry},
author = {Ana H. Ramirez-Andrade, Rosario Porras-Aguilar, Konstantinos Falaggis},
url = {https://doi.org/10.1117/12.2570600},
year = {2020},
date = {2020-08-21},
volume = {11490},
number = {09},
keywords = {metrology},
pubstate = {published},
tppubtype = {proceedings}
}
2019
Swain, Biswa Ranjan; Dorrer, Christophe; Qiao, Jie
High-performance optical differentiation wavefront sensing towards freeform metrology Journal Article
In: Opt. Express, vol. 27, no. 25, pp. 36297-36310, 2019.
Abstract | Links | BibTeX | Tags: CeFO related, metrology
@article{Swain2019,
title = {High-performance optical differentiation wavefront sensing towards freeform metrology},
author = {Biswa Ranjan Swain and Christophe Dorrer and Jie Qiao},
doi = {https://doi.org/10.1364/OE.27.036297},
year = {2019},
date = {2019-12-09},
urldate = {2019-12-09},
journal = {Opt. Express},
volume = {27},
number = {25},
pages = {36297-36310},
abstract = {We report the demonstration of freeform optics metrology with an optical differentiation wavefront sensor that relies on spatially dithered distributions of binary pixels to synthesize a far-field amplitude filter. Analysis of experimental results and comparison with a commercial low-coherence-length interferometer shows that freeform phase plates with different magnitude of wavefront slopes can be accurately characterized. RMS accuracy of ∼ λ/10 and precision of ∼ λ/70 at 633 nm were achieved with pixelated filters having 2.5-µm pixels. Simulations that describe the characterization of a freeform optical component in the presence of photodetection noise and filter nonlinearity demonstrate the robustness of this wavefront-sensing approach for freeform optics characterization.},
keywords = {CeFO related, metrology},
pubstate = {published},
tppubtype = {article}
}
We report the demonstration of freeform optics metrology with an optical differentiation wavefront sensor that relies on spatially dithered distributions of binary pixels to synthesize a far-field amplitude filter. Analysis of experimental results and comparison with a commercial low-coherence-length interferometer shows that freeform phase plates with different magnitude of wavefront slopes can be accurately characterized. RMS accuracy of ∼ λ/10 and precision of ∼ λ/70 at 633 nm were achieved with pixelated filters having 2.5-µm pixels. Simulations that describe the characterization of a freeform optical component in the presence of photodetection noise and filter nonlinearity demonstrate the robustness of this wavefront-sensing approach for freeform optics characterization.
BRUNO PICCIRILLO LUIS A. ALEMÁN-CASTANEDA, ENRICO SANTAMATO; ALONSO, MIGUEL A.
Shearing interferometry via geometric phase Journal Article
In: Optica, vol. 6, no. 4, pp. 396-399, 2019.
Abstract | Links | BibTeX | Tags: metrology, related
@article{ALEMÁN-CASTANEDA2019,
title = {Shearing interferometry via geometric phase},
author = {LUIS A. ALEMÁN-CASTANEDA, BRUNO PICCIRILLO, ENRICO SANTAMATO, LORENZO MARRUCCI, AND MIGUEL A. ALONSO},
url = {https://doi.org/10.1364/OPTICA.6.000396},
doi = {10.1364/OPTICA.6.000396},
year = {2019},
date = {2019-03-21},
journal = {Optica},
volume = {6},
number = {4},
pages = {396-399},
abstract = {We propose an approach based on geometric phase for per- forming several types of shearing interferometry through a ro- bust, compact, common-path setup. The key elements are two identical parallel plates with spatially varying birefringence distributions, which perform the shearing by writing opposite geometric phases on the two circular polarization components of the linearly polarized incident wavefront. This setup allows the independent control of the shearing magnitude and rela- tive phase of the two wavefront replicas. The approach is first illustrated for the simplest case of lateral shearing, and then extended to other geometries where the magnitude and direc- tion of the shear vary smoothly over the wavefront.},
keywords = {metrology, related},
pubstate = {published},
tppubtype = {article}
}
We propose an approach based on geometric phase for per- forming several types of shearing interferometry through a ro- bust, compact, common-path setup. The key elements are two identical parallel plates with spatially varying birefringence distributions, which perform the shearing by writing opposite geometric phases on the two circular polarization components of the linearly polarized incident wavefront. This setup allows the independent control of the shearing magnitude and rela- tive phase of the two wavefront replicas. The approach is first illustrated for the simplest case of lateral shearing, and then extended to other geometries where the magnitude and direc- tion of the shear vary smoothly over the wavefront.
2018
Yao, Jianing; Anderson, Alexander; Rolland, Jannick P.
Point-cloud noncontact metrology of freeform optical surfaces Journal Article
In: Optics Express, vol. 26, no. 8, pp. 10242-10265, 2018.
Abstract | Links | BibTeX | Tags: metrology, related
@article{yao18,
title = {Point-cloud noncontact metrology of freeform optical surfaces},
author = {Jianing Yao and Alexander Anderson and Jannick P. Rolland},
url = {https://doi.org/10.1364/OE.26.010242},
doi = {10.1364/OE.26.010242},
year = {2018},
date = {2018-04-09},
journal = {Optics Express},
volume = {26},
number = {8},
pages = {10242-10265},
abstract = {In this paper, we demonstrate the development of a point-cloud metrology method for the noncontact, high resolution, high precision testing of freeform surfaces. The method leverages swept source optical coherence tomography together with a common-path setup in the sample arm configured to mitigate the axial jitter caused by scanning and environmental perturbations. The lateral x-y scanning field was also rigorously evaluated for the sampling step, linearity, straightness, and orthogonality. Based on the finely engineered system hardware, a comprehensive system model was developed capable of characterizing the vertical displacement sensitivity and lateral scanning noise. The model enables predicting the point-cloud surface-metrology uncertainty map of any freeform surface and guiding the selection of optimum experimental conditions. A system was then assembled and experimentally evaluated first with flat and spherical standards to demonstrate the measurement uncertainty. Results of measuring an Alvarez freeform surface with 400-µm peak-to-valley sag show 93 nm (< λ/14) precision and 128 nm (< λ/10) root-mean-square residual from the nominal shape. The high resolution measurements also reveal mid spatial frequency structures on the test part.},
keywords = {metrology, related},
pubstate = {published},
tppubtype = {article}
}
In this paper, we demonstrate the development of a point-cloud metrology method for the noncontact, high resolution, high precision testing of freeform surfaces. The method leverages swept source optical coherence tomography together with a common-path setup in the sample arm configured to mitigate the axial jitter caused by scanning and environmental perturbations. The lateral x-y scanning field was also rigorously evaluated for the sampling step, linearity, straightness, and orthogonality. Based on the finely engineered system hardware, a comprehensive system model was developed capable of characterizing the vertical displacement sensitivity and lateral scanning noise. The model enables predicting the point-cloud surface-metrology uncertainty map of any freeform surface and guiding the selection of optimum experimental conditions. A system was then assembled and experimentally evaluated first with flat and spherical standards to demonstrate the measurement uncertainty. Results of measuring an Alvarez freeform surface with 400-µm peak-to-valley sag show 93 nm (< λ/14) precision and 128 nm (< λ/10) root-mean-square residual from the nominal shape. The high resolution measurements also reveal mid spatial frequency structures on the test part.
Zhao, Nan; Papa, Jonathan C.; Fuerschbach, Kyle; Qiao, Yanfeng; Thompson, Kevin P.; Rolland, Jannick P.
Experimental investigation in nodal aberration theory (NAT) with a customized Ritchey-Chrétien system: third-order coma Journal Article
In: Optics Express, vol. 26, no. 7, pp. 8729-8743, 2018.
Abstract | Links | BibTeX | Tags: metrology, related
@article{nanzhao18,
title = {Experimental investigation in nodal aberration theory (NAT) with a customized Ritchey-Chrétien system: third-order coma},
author = {Nan Zhao and Jonathan C. Papa and Kyle Fuerschbach and Yanfeng Qiao and Kevin P. Thompson and Jannick P. Rolland},
url = {http://www.opticsexpress.org/abstract.cfm?URI=oe-26-7-8729},
doi = {10.1364/OE.26.008729},
year = {2018},
date = {2018-04-02},
journal = {Optics Express},
volume = {26},
number = {7},
pages = {8729-8743},
abstract = {Nodal aberration theory (NAT) describes the aberration properties of optical systems without symmetry. NAT was fully described mathematically and investigated through real-ray tracing software, but an experimental investigation is yet to be realized. In this study, a two-mirror Ritchey-Chrétien telescope was designed and built, including testing of the mirrors in null configurations, for experimental investigation of NAT. A feature of this custom telescope is a high-precision hexapod that controls the secondary mirror of the telescope to purposely introduce system misalignments and quantify the introduced aberrations interferometrically. A method was developed to capture interferograms for multiple points across the field of view without moving the interferometer. A simulation result of Fringe Zernike coma was generated and analyzed to provide a direct comparison with the experimental results. A statistical analysis of the measurements was conducted to assess residual differences between simulations and experimental results. The interferograms were consistent with the simulations, thus experimentally validating NAT for third-order coma.},
keywords = {metrology, related},
pubstate = {published},
tppubtype = {article}
}
Nodal aberration theory (NAT) describes the aberration properties of optical systems without symmetry. NAT was fully described mathematically and investigated through real-ray tracing software, but an experimental investigation is yet to be realized. In this study, a two-mirror Ritchey-Chrétien telescope was designed and built, including testing of the mirrors in null configurations, for experimental investigation of NAT. A feature of this custom telescope is a high-precision hexapod that controls the secondary mirror of the telescope to purposely introduce system misalignments and quantify the introduced aberrations interferometrically. A method was developed to capture interferograms for multiple points across the field of view without moving the interferometer. A simulation result of Fringe Zernike coma was generated and analyzed to provide a direct comparison with the experimental results. A statistical analysis of the measurements was conducted to assess residual differences between simulations and experimental results. The interferograms were consistent with the simulations, thus experimentally validating NAT for third-order coma.
2017
Lambropoulos, John C.
Twyman effects in thin curved optics Proceedings
SPIE, vol. SPIE Vol 10448, no. 104480V (2017), 2017.
Abstract | Links | BibTeX | Tags: CeFO related, metrology
@proceedings{Lambropoulos172,
title = {Twyman effects in thin curved optics},
author = {John C. Lambropoulos},
editor = {Julie L. Bentley; Sebastian Stoebenau},
url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10448/104480V/Twyman-effects-in-thin-curved-optics/10.1117/12.2279833.short},
year = {2017},
date = {2017-10-20},
volume = {SPIE Vol 10448},
number = {104480V (2017)},
publisher = {SPIE},
series = {Optifab},
abstract = {The Twyman effect refers to the fact that, when a thin optical plate has one side ground, the plate bends with the ground side becoming convex, i.e. as if the ground side is in a residual compressive stress. Such deformation often shows up as “power” on form measurements of the other (usually polished) plate surface. For thin flat optics, Twyman effects become important at aspect ratios of 1:25 or thinner. In this case, the optic bends throughout its surface with a constant curvature, i.e. bending extends over the whole surface. Here we discuss Twyman effects for mildly or highly curved thin axisymmetric optics such as cylinders, spheres, and shallow lenses or mirrors. We also outline extensions to more complex geometries, such as ogives. We show that the deformation in thin curved optics is significantly different from flat plates: In curved optics, deformation consists of a simple stretching contribution, valid over the largest portion of the optic, plus a complex, spatially-dependent bending contribution in a boundary layer, valid near the free edges of the optic. },
keywords = {CeFO related, metrology},
pubstate = {published},
tppubtype = {proceedings}
}
The Twyman effect refers to the fact that, when a thin optical plate has one side ground, the plate bends with the ground side becoming convex, i.e. as if the ground side is in a residual compressive stress. Such deformation often shows up as “power” on form measurements of the other (usually polished) plate surface. For thin flat optics, Twyman effects become important at aspect ratios of 1:25 or thinner. In this case, the optic bends throughout its surface with a constant curvature, i.e. bending extends over the whole surface. Here we discuss Twyman effects for mildly or highly curved thin axisymmetric optics such as cylinders, spheres, and shallow lenses or mirrors. We also outline extensions to more complex geometries, such as ogives. We show that the deformation in thin curved optics is significantly different from flat plates: In curved optics, deformation consists of a simple stretching contribution, valid over the largest portion of the optic, plus a complex, spatially-dependent bending contribution in a boundary layer, valid near the free edges of the optic.
2014
Yao, Jianing; Rolland, Jannick P.
Freeform Optics Metrology Using Optical Coherence Tomography Conference
Optical Fabrication and Testing, OSA 2014.
Abstract | Links | BibTeX | Tags: metrology, related
@conference{Yao2014,
title = {Freeform Optics Metrology Using Optical Coherence Tomography},
author = {Jianing Yao and Jannick P. Rolland },
doi = {https://doi.org/10.1364/OFT.2014.OW3B.4},
year = {2014},
date = {2014-06-25},
urldate = {2014-06-25},
booktitle = {Optical Fabrication and Testing},
organization = {OSA},
abstract = {We investigate the capability of a custom Fourier-domain swept-source optical coherence tomography method for non-contact freeform optics metrology. First results demonstrate the feasibility of measurement of an Alvarez surface with 400 µm sag.},
keywords = {metrology, related},
pubstate = {published},
tppubtype = {conference}
}
We investigate the capability of a custom Fourier-domain swept-source optical coherence tomography method for non-contact freeform optics metrology. First results demonstrate the feasibility of measurement of an Alvarez surface with 400 µm sag.