CeFO-Related Publications

@article{TAYLOR2019,

title = {Femtosecond laser polishing of germanium},

author = {LAUREN L. TAYLOR, JING XU, MICHAEL POMERANTZ, THOMAS

R. SMITH, JOHN C. LAMBROPOULOS, AND JIE QIAO},

url = {https://doi.org/10.1364/OME.9.004165},

year  = {2019},

date = {2019-10-02},

journal = {Optical Materials Express},

volume = {9},

number = {11},

pages = {4165-4177},

abstract = {Freeform optics can reduce the cost, weight, and size of advanced imaging systems,

but it is challenging to manufacture the complex rotationally asymmetric surfaces to optical

tolerances. To address the need for disruptive, high-precision sub-aperture forming and finishing

techniques for freeform optics, we investigate an alternative, non-contact polishing methodology

using femtosecond lasers, combining modeling, experiments, and demonstrations. Femtosecondlaser-

based polishing of germanium was investigated using an experimentally-validated twotemperature

model of laser/germanium interaction to guide the understanding and selection of

laser parameters to achieve near-nonthermal ablation for polishing and figuring. For the first time

to our knowledge, model-guided femtosecond laser polishing of germanium was successfully

demonstrated, achieving precision material removal while maintaining single-digit nanometer

optical surface quality. The demonstrated femtosecond-laser-based polishing technique lays the

foundation for semiconductor optics polishing/fabrication using femtosecond lasers and opens a

viable path for high-precision, complex sub-aperture optical polishing tasks on various materials.},

keywords = {CeFO manufacturing, CEFO metrology, fabrication, Freeform surfaces, manufacturing, Mid-Spatial Frequency error},

pubstate = {published},

tppubtype = {article}

}