Fundamentals of material removal in silicon carbide for freeform optics

P. Shanmugam, J. D. Owen, S. Salzman, J. R. Troutman, J. Lambropoulos, and M. A. Davies

in Proceedings of the ASPEN/ASPE 2017 Spring Topical Meeting: Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications, Paper 0048, 14-17 March 2017, Hong Kong