Comparison of two-temperature and thermal models for prediction of the optimal femtosecond laser-material processing of silicon

Ryan E. Scott, Lauren L. Taylor, and Jie Qiao

in OSA Technical Digest (online) (Optical Society of America, 2017), paper ATu4C.5.

A thermal and a two-temperature model (TTM) describing femtosecond laser-material interactions are compared. Both models accurately describe thermal response of silicon to multi-pulse irradiations, while the TTM distinguishes between thermal and non-thermal regimes