Jianing Yao, Jinxin Huang, Panomsak Meemon, Michael Ponting, and Jannick P. Rolland
A hybrid confocal-scan swept-source optical coherence tomography metrology system was conceived for simultaneous measurements of the refractive index and thickness profiles of polymeric layered gradient refractive index (GRIN) optics. An uncertainty analysis predicts the metrology capability of the system and guides the selection of an optimum working numerical aperture. Experimental results on both a monolithic and a GRIN layered sheet are demonstrated to be in close agreement with theoretical predictions. Index measurement precision reached 0.0001 and 0.0008 for measuring 2.8 mm and ~300 µm thick layers, respectively. The thicknesses of these layers were simultaneously measured with a precision of 0.28 and 0.17 µm, respectively.