The Center for Freeform Optics
An Industry/University Cooperative Research Center

Subsurface damage (SSD) assessment in ground silicon carbide (SiC)

John C. Lambropoulos and Sivan Salzman and Thomas R. Smith and Jing Xu and Michael Pomerantz and Prithiviraj Shanmugam and Matt Davies and Lauren L. Taylor and Jie Qiao

in Optical Design and Fabrication 2017 (Freeform, IODC, OFT), OSA Technical Digest (online) (Optical Society of America, 2017), paper OM3B.5.

We assess subsurface damage in ground Silicon Carbide, by measurement of roughness evolution and material removal rate in sub-aperture finished spots, or by estimates via material property figures of merit or abrasive size used for grinding.